Gas Equipment System  [ Return towards  Services  ]

 

Besides representing international brands, we also design and manufacture our own Optima range of ultra high purity gas equipment. We also provide a computerised gas monitoring system - "FabVision", to link all gas equipments to a central control unit.    

Our range of gas equipment include:

Gas Cabinets & Panels

Gas cabinet is source delivery equipment which houses the gas cylinder and allows safe delivery of the gas from the cylinder to the process. In addition, it allows proper purging of the gas within the manifold so that cylinder change and maintenance can be performed. We have the largest installed base in Singapore, with more than 1,800 units of gas cabinets and panels already installed. We also design and manufacture gas cabinets.

Valve Manifold Boxes & Panels

 

While gas cabinet is the source equipment, a Valve Manifold Box (VMB) is distribution equipment. It typically accepts the gas from a gas cabinet and distributes it to 4 outlets. But it can distribute to more outlets, depending on the gas flow rate of each outlet. Similar to gas cabinets, the manifold within the VMB allows for cycle purging and venting of the gas. It also carries sensor to detect for alarm conditions. Hazardous gas distribution manifold is housed within an enclosure while that for inert gas is not.

In 1998, we set up the Optima Centre – ultra-high purity (UHP) equipment manufacturing facilities to manufacture our very own VMBs. In 2002, our Optima V200 VMB is fully certified to SemiS2-200E requirements, further demonstrating our capabilities in meeting internationally recognized and very stringent standards.

Gas Monitoring System

For a production facility that installs a large number of gas cabinets and VMBs, it is recommended that a central gas monitoring system be installed so that all gas supply can be monitored constantly. We can offer such a computerized monitoring system, FabVision. This system is developed locally using Intellution as the platform but other kinds of platform are also available.

FabVision can be used to monitor the following:

• Cylinder cabinets and valve manifold boxes
• Chemical dispense module and valve boxes
• Gas detection systems
• Gas abatement systems, scrubbers
• Shutdown panels
• Electrical power panels
• Sprinkler control panels
• Tank farm
• Chillers

With this system, you will receive:

• Alarm management report
• Reports containing daily, weekly or monthly gas consumption, alarm and status
• Passing of info to FMS
• Data update every one second and up to 8000 tag points per server
• Auto pages, email and SMS upon critical alarm conditions. 

Bulk Specialty Gas System

With the increase in gas consumption especially in the 12” wafer, LCD and PV industry, it is no longer viable to supply gases through standard cylinders. The only practical method of supply is through bulk container such as pallet, drum, ton container or even tube trailer. 

SOXAL started the bulk specialty gas supply system in 1994 for HCl. Till date we have 33 bulk specialty gas supply systems for gases such as Silane, Ammonia, Nitrogen Trifluoride, Hydrogen Chloride etc. With such high flow demand, SOXAL is well positioned to handle its demanding design requirement to ensure sufficient flow out of the source, Joule-Thomson effect across the pressure regulator and pressure/flow fluctuations. With our patented “All Vapour Pressure” design, we are able to extract more gas from a same container compared to traditional heating. This can reduce the gas content on site, site storage space and potential effects of a leak.

In addition, bulk specialty gas supply system is not only the gas panel, it includes the design of the bunker, its environmental and safety effect, the hazards relating to the surrounding and application for authority approval. With our Air Liquide resources, we have demonstrated to the customers that we are able to deliver a high flow specialty gas system that meets the flow, safety and the environmental requirement, thereby meeting the authorities’ requirement.

Gas Abatement System

Before releasing any gas to the atmosphere, we have to ensure that these gases are treated and are harmless. We can offer various types of abatement designed to maximise gas output and minimise cost.

They are:

• Dry type – makes use of chemical media such as metal oxide to absorb the gas that flows through it
• Wet type – used for acidic gases, typically corrosive gases. The water will be sprayed over the gas to dissolve into acidic liquid and then pumped to a waster water treatment plant.
• Burn type – makes use of electricity to decompose the gas at 800 Degrees. The by-products are then filtered out or treated by dry or wet type abatement.
• Combination of the 3 above
• Plasma – used to treat PFC gases which are now identified as a major cause for global warming and ozone destruction. These gases are very stable and cannot be broken down easily.

UHP Equipment Manufacturing 

Our facilities are built in 1998 and known as Optima Centre (Centre for the Best).

Optima Centre

 Total Clean room Space:

• 140m² of clean room area
• Class 10,000: De-bagging Room
• Class 1,000: Cutting Room C
• lass 10: VMB Assembly, Testing Area, Packaging Area, Non-process Welding
• Class 1: UHP Process Welding

Optima Centre Manufacturing Program

 Our manufacturing facilities meet the following:

• ISO 9001-2000
• Design Program
• Components Selection
• Zero Detection Program
• On-time Delivery  

                      

Design & Consultation

Together with our consultant partners, we also provide design and consultation for gas application, especially those relating to hazardous gases.

• Design of complete gas delivery system
• Design of gas room
• Management for toxic permit to government authority, including involvement in Quantitative Risk Assessment
• Failure mode effect analysis of equipment
• Hazop analysis of gas operation
• Emergency response plan