Gases [ Return towards Electronics]

It is used as carrier gas for overall protection against impurities and oxidation in the semiconductor and soldering processes. In its cold, liquid form, it is used as a cooling medium in the Environmental Testing of electronic devices.

It is used as carrier and inert gas in semiconductors and also as a process gas for sputtering, reactive ion etching and plasma processing.

It is used as a carrier gas in semiconductor processes and as a scavenger gas in atmosphere soldering and for annealing copper films. The use of forming gases (that is Hydrogen diluted in Nitrogen) allows virtually a complete elimination of oxygen and the inconveniences in medium to high temperature processes.

Ultra-pure oxygen is used to oxidize certain materials, such as Si to SiO₂, ashing of photoresist and to achieve chemical vapor deposition of oxides. It is also used to make ozone for oxidations or cleaning.