PFC Abatement  [ Return towards  Equipment  ]

High PFC Abatement Efficiency

• 99.5 % for most PFCs even at high flow rates ;
• Atmospheric pressure plasma : broad impedance matching characteristics and process changes or fluctuations insensitivity ;
• Excellent tuning characteristics (gas residence time/plasma column length-power) ; and
• Non equilibrium chemistry plasma optimization to allow an efficient PFC destruction without undesirable high temperature reaction products like NOx.

Low Cost of Ownership

• Minimal utilities requirements;
• No fuel or catalyst requirements;
• Low maintenance: excellent reliability of dielectric discharge tube and dielectric cooling fluid; and
• Re-usable cooling water

 

Seamless Integration

• Post pump system: no interference with day-to-day operations;
• High overall reliability: no risk to the turbo-pump and no corrosive by-products through the dry pump;
• Low pressure drop (less than 30 mbar - 100 slm): no impact on tool pumping system; and
• By-pass system: direct flow from dry pump to exhaust collector if necessary (pump maintenance etc.)

 

Modular Design

• Up to 120 slm (total flow rate); and
• Multi plasma tubes design to abate more PFCs options