CANDI System: Advanced Precursors  [ Return towards  Equipment  ]

The CANDI system is fully equipped with an abundance of safety features using the latest technologies: redundant leak sensors, pressure switches, open door detection, gas detection and sprinklers (both optional features) and etc. Fully compliant with international regulations, the CANDI system is SEMI S2 certified, CEM tested by a third party and CE-marked as well. Maintenance is easier with all the components easily access from the front door. To make things even simpler, standard maintenance operations are programmed in the PLC and initiated via the Touch Screen.

 

Innovative Distribution Technology
Our innovative distribution technology makes the equipment the preferred choice for system performance. Specific advanced features have been implemented to guarantee chemical quality at the outlet of the CANDI system.

Helium-pressurized distribution technology is used to feed the chemicals to production lines and also to fill the day tank from the shuttle drum. Because distribution is not interrupted when the shuttle drum is changed, the dispense pressure remains constant regardless of the liquid consumption rate.

Options such as the Degas Module which is used in the removal of dissolved He in liquid precursors.

 

Highly Reliable Liquid Supply

Using advanced process controls, the equipment is designed to give priority to chemical distribution with a total guarantee of required process parameters.

High uptime is achieved for the distribution of liquid chemicals. Extensive instrumentation, along with precise PLC configuration, allows the CANDI to operate under back-up modes.

Fully automated process management minimizes bubbles and controls liquid level and supply pressure. This process is used extensively on liquid chemicals such as TEOS, TEB, TEPO, and TiCl4.

A Solution for High Consumption: the Bulk CANDI System

To meet your high flow chemical requirements at point of use, the Bulk CANDI system is recommended.

With our patented pressure gradient distribution technology, the Bulk CANDI feeds the chemicals to production lines from small pressurized vessels mounted in the dispense unit. These vessels are alternatively filled from the pressurized day tank. This specific configuration allows several automatic degraded modes while having a low volume of chemical under pressure.

Our advanced distribution technology also has its own built-in expert system, which diagnoses component failures and initiates automatic back-up modes. As a result, the Bulk CANDI system can supply up to 40 tools at optimal uptime.

 

To comply with your specifications in terms of gas quality, reliability and safety, a complete line of gas cabinets, FabStream™, can be considered.