ALUX™ Distribution  [ Return towards  Optoelectronics  ]

ALUX^TM Distribution offers a large array of safe and reliable equipment and turn-key engineering dedicated to wet chemicals (FabChem), liquid precursors (CANDI) and gas (Fabstream) distributions based on uniquely developed patented technologies.

Fabstream

• Fabstream Gas Cabinets and Panels are used for inert and specialty gases.
• Fabstream AVP (All Vapour Phase) for high flow delivery of liquefied gases like NH₃.
• Fabstream BDGS (Bull Delivery Gas System) for bulk and high flow delivery of specialty gases such as SiH₄ and NF₃. CANDI delivery for liquid precursors and Organometallics such as POCl₃, Diethylzinc or Trimethylgallium.

FabChem 

• FabChem for wet chemical delivery
  FabChem Dilution for on-line continuous blending. 

As part of ALUX^TM Service, Air Liquide manages the overall engineering project (gas yard design, piping, equipment installation, qualification) based on your requirements. 

There is always engineering support nearby your facilities as ALUX^TM Distribution relies on Air Liquide manufacturing facilities in Europe (France, Germany, The Netherlands), Asia (Taiwan, Singapore, Japan) and America.