Gases  [ Return towards  Electronics Components & Assembly ]

Ultra-pure O₂ is used to oxidize certain materials, such as Si to SiO₂, or ashing of photoresist and to achieve chemical vapor deposition of oxides. It is also used to make ozone for oxidations or cleaning.

It is used as a carrier gas for overall protection against impurities and oxidation in semiconductor and soldering processes. In its cold, liquid form, it is used as a cooling medium in the Environmental Testing of electronic devices.

It is used as a carrier gas in semiconductor processes and as a scavenger gas in atmosphere soldering as well as for annealing copper films. The use of forming gases (that is H₂ diluted in N₂) allows virtually complete elimination of oxygen and its inconveniences, in medium to high temperatures.